PhableX, developed by Eultiha AG, is an introductory, manually operated photolithography tool tailored for high-volume printing of periodic patterns. With its overlay alignment capabilities, PhableX accommodates wafer sizes ranging from 100mm to 200mm. The tool provides customizable options to meet the specific demands of photonic applications. Notable features of PhableX include its non-contact operation, ensuring the safeguarding of masks and substrates against damage and contamination. Additionally, it facilitates cassette-to-cassette automatic wafer processing, enhancing operational efficiency. The system delivers highly uniform and reproducible printing outcomes, supporting both 1D and 2D periodic pattern printing. PhableX is compatible with non-flat and thin glass substrates, offering flexibility in substrate selection. It achieves precise and sharp printing with a high resolution of 60 nm half pitch and practically unlimited depth-of-focus. Utilizing UV and DUV lasers as light sources, the tool is equipped with automatic overlay alignment capability, streamlining the printing process.
PhableX is accompanied by comprehensive application support, encompassing photoresists and masks. It boasts low maintenance and production costs, positioning it as a cost-effective solution for diverse photolithography requirements.
